1. Optical Wafer Thickness MicroGauge (OWTM)

1) Introduction
FIBERPRO OWTM can measure Thickness, TTV, LTV, Warp and Bow of various kinds of wafers which are light-reflected materials.

2) Application: Si Wafer / Sapphire Wafer / Glass Wafer / SiO2 / GaAs material manufacturing process.





[Sapphire Wafer] [Silicon Wafer] [Glass Wafer]

3) Product (Accuracy: 0.2um ~ 0.5um)
* IFP-801S: Up to 6 inch Wafer
* IFP-801: Up to 12 inch Wafer
* IFP-801L: Up to 18 inch Wafer




[IFP-801S] [IFP-801]





[Operating Video]


4) Measurement Point: Thickness/TTV/LTV/Warp/Bow/Flatness




[Measurement GUI]


** Site: http://www.fiberpro.com/eng/ds2_1_7.html?no=87&t=3

========================================================================================================

2. Optical Thickness Measurement System (OTMS)

1) Introduction
FIBERPRO OTMS uses the principle of white light interferometer-based technology and non-contact method for online or off-line thickness measurement.

2) Measurement Point: Thickness

3) Application
* Material: Si-Wafer, Sa-Wafer, Glass Wafer, SiO2, GaAS, Others
* Industry: LCD glass panel, Glass products, medical membranes, ophthalmic products,
Etc




[Glass flat panel] [Wafer, Panel] [Contact lens]

4) Product
* IFP-800-2
- Range: 50um ~ 2,000um
- Accuracy: 0.2um

* IFP-800-10
- Range: 2,000um ~ 10.0mm
- Accuracy: 1.0um


** Site: http://www.fiberpro.com/eng/ds2_1_7.html?no=102&t=3

# Contact Point
- E-mail: sales@fiberpro.com
- Phone: +82-42-360-0037
- Name: Mr. Lee, Jongbo